Gas Filtration
‘BIKAL™‘ PLAYTG’s fluid filtration and purification products, incorporates specialized knowledge, technology, and solutions that can meet your company’s requirements.
We offer customized high-performance fluid filtration products that can be used in key processes such as semiconductor and display,
as well as in environments like chambers, wafers, and cleanrooms.
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High Purity Low Pressure Drop Fiber Filter
BIKAL™ VFT Series are metal fiber vapor filters with best solutions
to optimize vapor filtration efficiency, reduce particles and low pressure drop for process chambers.BIKAL™ HVFT series are metal fiber vapor filters with heating function. heating vapor filters are designed to meet optimized vapor filtration stable inside temp control and efficiency.
Features & Benefits
Metal Fiber Vapor Filters
Superior Performance in particle control
High flow rate / Low pressure drop
Optimize and expandable in various design
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High Purity Gas Filters
PLAYTG’s filters can be easily applied to remove impurities and contaminants from fluids within semiconductor processes and chambers, ensuring a high-purity environment.
Additionally, they can be modified and customized to meet the specific requirements of the user’s environment.BIKAL™ GFT Series are all metal gas filters with best solutions for high purity gas systems.
BIKAL™ GFP Series are PTFE gas filters with best solutions for high
purity gas systems.BIKAL™ IGF Series are IGS block gas filters with best solutions for high purity gas systems.
Features & Benefits
Heating Vapor Filters
Stable vapor temp control
Superior Performance in particle control
High Flow Rate / Low Pressure Drop
Features & Benefits
All Metal Gas Filters
Superior corrosion resistance and excellent compatibility
Wide flow properties
Low pressure drop allows high flow performance
Features & Benefits
PTFE gas filters
Superior corrosion resistance and excellent compatibility
Low pressure drop allows high flow performance
Compact diameter for easy installation
Features & Benefits
IGS block gas filters
Superior corrosion resistance and excellent compatibility
Low pressure drop allows high flow performance
Compact diameter for easy installation
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High Purity Fast Vent Diffusers
BIKAL™ DF Series are metal fiber diffuser with best solutions
to reduce particles and vent time in load lock and transfer chambers
Features & Benefits
All metal gas diffusers
Superior performance in particle control
Minimizing vent time in all applications
Optimize and expandable in various design